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Parylene Coating

Parylene Coating
Parylene Coating Systems

On this page, our company from Rosenheim presents our machines / coating systems. We, of course, offer individual consultation, including the answers to your questions. We are looking forward to your call at         +49 8031 - 7 97 72 - 0 (Rosenheim).

Labcoater Series 100 

 

  • Available in different sizes
  • A good value labcoater with exchangeable process chamber
  • Dimensions: L: 850mm W: 900mm H: 1600mm
  • Weight: 80 KG
  • Volume: 30 Liter
  • Process chamber: 300mm Ø H: 300mm
  • Cooling system : 4 liter (electromechanical Cool-trap)
  • Vacuum connection: DIN 25 ISO-KF
  • Venting: electromagnetic solenoid valve
  • Pump system: 10m³/h
  • Electrical connection: 3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW
 Labcoater for laboratory and production

Labcoater Series 200 for parylene coatings

  • Labcoater for laboratory work
  • Suitable for smaller companies and production facilities
  • Plasma source available
  • Dimensions: L: 850mm W: 900mm H: 1600mm
  • Weight: 80 KG
  • Volume: 25-35 Liter
  • Process chamber: 300mm Ø H: 300mm
  • Cooling system : 4 liter (electromechanical Cool-trap)
  • Vacuum connection: DIN 25 ISO-KF
  • Venting: electromagnetic solenoid valve
  • Pump system: 10m³/h
  • Electrical connection: 3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW
  • available with or without plasma

Labcoater Series 200/300 for parylene coatings

  • Labcoater for laboratory and production facilities
  • Optimized for smaller companies and production teams
  • Optional equipment makes this labcoater a very versatile machine with a variable process chamber volume, starting at 25l.
  • Built-in plasma source
  • Also available as cleanroom version  
  • Dimensions: L: 1220mm W: 1050mm H: 1920mm
  • Weight: 110 KG
  • Volume: 25 / 35 / 80 Liter
  • Process chamber: 300mm Ø H: 300mm (25 l), 300mm Ø / H: 350mm  (35 l), 450m Ø H: 500mm (80l)
  • Plasma source: 2,45GHz, 600 Watt
  • incl. 1 gas channel (gas distribution system inside the process chamber), up to 3 channels possible
  • Cooling system : 4 liter (electromechanical Cool-trap)
  • Vacuum connection: DIN 40 ISO-KF
  • Venting: electromagnetic solenoid valve
  • Pump system: 50m³/h
  • Electrical connection: 3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW
  • available with or without plasma

Series 3000 Standard System

Standard production tool of the series 2000 (without plasma) series 3000 with plasma support.

  • Modular assembly and variable chamber size distinguish this thorougly tested production- and coating machine
  • Made for industrial usage
  • Can meet large and demanding production volumes through larger chambers
  • Dimensions: L: 2095mm W: 800mm H: 1450mm
  • Weight: ~300 KG
  • Volume: 140 / 200 / 300 Liter
  • Process chamber: 500mm Ø H: 700mm (140 l), 600mm Ø / H: 7000mm  (200 l), 700m Ø H: 800mm (300l)
  • Plasma source: 2,45GHz, 1200 Watt
  • incl. 1 gas channel (gas distribution system inside the process chamber), up to 3 channels possible
  • Cooling system : 8 liter (electromechanical Cool-trap)
  • Vacuum connection: DIN 40 ISO-KF
  • Venting: electromagnetic solenoid valve
  • Pump system: 75m³/h
  • Electrical connection: 3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW

Series 3000 LV 600/700

  • Dimensions: L: 2400mm W: 960mm H: 1460mm
  • Weight: ~350 KG
  • Volume: 600 / 700 Liter
  • Process chamber: 800mm Ø H: 1100mm (600l) / 1300mm (700l)
  • Plasma source: 2,45GHz, 1200 Watt
  • incl. 1 gas channel (gas distribution system inside the process chamber), up to 3 channels possible
  • Cooling system : 8 liter (electromechanical Cool-trap)
  • Vacuum connection: DIN 63 ISO-KF
  • Venting: electromagnetic solenoid valve
  • Pump system: 75m³/h
  • Electrical connection: 3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW

Series 3000 LV 800/1000

  • Dimensions: L: 2600mm W: 960mm H: 1460mm
  • Weight: ~430 KG
  • Volume: 800 / 1000 Liter
  • Process chamber: 1150mm Ø H: 600mm (800l) / 1000mm Ø H: 1100mm (1000l)
  • Plasma source: 2,45GHz, 1200 Watt
  • incl. 1 gas channel (gas distribution system inside the process chamber), up to 3 channels possible
  • Cooling system : 8 liter (electromechanical Cool-trap)
  • Vacuum connection: DIN 63 ISO-KF
  • Venting: electromagnetic solenoid valve
  • Pump system: 75m³/h
  • Electrical connection: 3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW
 Parylene coating system of series 3000

Series 3000 RR

  • developed for applications which have to be executed in clean rooms.  
  • modular assembly and variable chamber sizes.
  • countless options like turntables or different holders for substrates.

  • Dimensions: L: mm B: mm H: mm
  • Weight: 80 KG
  • Volume: 30 Liter
  • Process chamber: 300mm Ø H: 300mm
  • Cooling system : 4 liter (electromechanical Cool-trap)
  • Vacuum connection: DIN 25 ISO-KF
  • Venting: electromagnetic solenoid valve
  • Pump system: 10m³/h
  • Electrical connection: 3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW
 Parylene coating system series 2000 with rotary drum

Series 2000 with rotary drum

  • Parylene coating system series 2000 with rotary drum
  • Rotary drum system for parylene coating and even distribution
  • Compact coating machine with integrated pump and cooling system
  • Works best with smaller substrates
 Parylene coating system series 2000 with rotary drum
  • Dimensions: L: mm B: mm H: mm
  • Weight: 80 KG
  • Volume: 30 Liter
  • Process chamber: 300mm Ø H: 300mm
  • Cooling system : 4 liter (electromechanical Cool-trap)
  • Vacuum connection: DIN 25 ISO-KF
  • Venting: electromagnetic solenoid valve
  • Pump system: 10m³/h
  • Electrical connection: 3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW
Cluster Coating System

Parylene sandwich-coating system

  • Dimensions: L: 2000mm W: 1800mm H: 2000mm
  • Weight: ~320 KG
  • Volume: 30 litres per chamber
  • Air lock: 50 litres
  • 3 process chambers: VA L:300 W:300 H:300 
  • Plasma source: 2,45GHz, 1200 Watt / 13,56 MHz, 600 Watt
  • incl. 3x3 gas channels (gas distribution system inside the process chamber), up to 3 channels possible
  • incl. air lock robot, example substrate holder for air lock
  • Cooling system : 8 liter (electromechanical Cool-trap)
  • Vacuum connection: DIN 63 ISO-KF
  • Venting: electromagnetic solenoid valve
  • 3 Pump systems: 40m³/h
  • Electrical connection: 3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW