Forschungsbericht der FH München

Entwicklung und Aufbau einer Beschichtungsanlage mit angedockter Plasmaquelle zum

Abscheiden von Poly Parylene                                                                                                                                          

Stanislav. F. Dribinsky, Gerhard Franz / University of Applied Sciences and Dieter Voss/

Plasma Parylene Coating Services.                                                                                                 Download PDF

Properties of various polyparylenes deposited by chemical vapor deposition                                  

Stanislav. F. Dribinsky, Gerhard Franz / University of Applied Sciences and Dieter Voss/

Plasma Parylene Coating Services.                                                                                                Download PDF

Diagnositc of Microwave Plasmas Applied for Organic Layer Deposition                                         Download PDF