Cleaning with plasma

At the cleaning of surfaces using plasma, small remains of organic substances are removed. Normally a process of primary cleaning is applied before this cleaning.

A sterile ultra pure cleaning with plasma is reached, if the parts which should be cleaned, are treated with oxygen plasma. The organic remains, which should be removed, react with the oxygen and the so produced gas is extracted with the vacuum pump. At some cases other process gases are used such as hydrogen or noble gases. That depends on the pollution or the properties of the substrates which should be cleaned.

 Plasma System Series AL